MURAL - Maynooth University Research Archive Library



    Virtual Metrology for Plasma Etch using Tool Variables


    Lynn, Shane and Ringwood, John and Ragnoli, Emanuele and McLoone, Sean F. and MacGearailt, Niall (2009) Virtual Metrology for Plasma Etch using Tool Variables. Advanced Semiconductor Manufacturing Conference, 2009. . pp. 143-148. ISSN 1078-8743

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    Abstract

    This paper presents work carried out with data from an industrial plasma etch process. Etch tool parameters, available during wafer processing time, are used to predict wafer etch rate. These parameters include variables such as power, pressure, temperature, and RF measurement. A number of variable selection techniques are examined, and a novel piecewise modelling effort is discussed. The achievable accuracy and complexity trade-offs of plasma etch modelling are discussed in detail.

    Item Type: Article
    Keywords: Virtual Metrology; Plasma Etch; Tool Variables; Plasma materials processing;
    Academic Unit: Faculty of Science and Engineering > Electronic Engineering
    Item ID: 1934
    Depositing User: Professor John Ringwood
    Date Deposited: 19 May 2010 13:51
    Journal or Publication Title: Advanced Semiconductor Manufacturing Conference, 2009.
    Publisher: IEEE
    Refereed: Yes
    URI:

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