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    On the modelling and closed loop control of an inductively coupled plasma chamber


    Keville, Bernard and Iordanov, Petar and Ringwood, John and Doherty, Sean and Faulkner, Ronan and Soberon, Felipe and McCarter, Angus (2006) On the modelling and closed loop control of an inductively coupled plasma chamber. In: IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing, December 2006, Singapore.

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    Abstract

    As a first step towards real time, multivariable control of an argon/ oxygen plasma, the implementation of real time control of ion flux in an inductively coupled argon plasma through modulation of the RF power is described. It is demonstrated that an elementary PID controller does not guarantee stable control of ion flux over a range of operating points and hence that more elaborate control strategies must be considered. The design and testing of control algorithms is facilitated by suitable dynamical models of a process. A model of the inductively coupled plasma chamber which is suitable for control simulations is described. Ongoing and future work are discussed.

    Item Type: Conference or Workshop Item (Paper)
    Keywords: semiconductor manufacturing; plasma process; etching; closed loop control;
    Academic Unit: Faculty of Science and Engineering > Electronic Engineering
    Item ID: 9496
    Depositing User: Professor John Ringwood
    Date Deposited: 22 May 2018 15:42
    Refereed: Yes
    URI:

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