Up a level |
Susto, Gian Antonio and Pampuri, Simone and Schirru, Andrea and De Nicolao, Guiseppe and McLoone, Sean F. and Beghi, Alessandro (2012) Automatic Control and Machine Learning for Semiconductor Manufacturing: Review and Challenges. In: 10th European Workshop on Advanced Control and Diagnosis (ACD 2012), Nov. 8-9, 2012, Technical University of Denmark, Kgs. Lyngby, Denmark.