MURAL - Maynooth University Research Archive Library



    Items where Author is "Butler, Shane W."


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    Conference or Workshop Item

    Butler, Shane W. and Ringwood, John and MacGearailt, Niall (2009) Prediction of Vacuum Pump Degradation in Semiconductor Processing. In: SAFEPROCESS'09, 7th IFAC Symposium on Fault Detection, Supervision and Safety of Technical Processes, June 30 - July 3 2009, Barcelona.

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