MURAL - Maynooth University Research Archive Library



    Items where Author is "Ellingboe, A.R."


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    2008

    Milosavljević, V., Ellingboe, A.R., Gaman, C. and Ringwood, John (2008) Real-time plasma control in a dual-frequency, confined plasma etcher. Journal of Applied Physics, 103 (083302). ISSN 0021-8979

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