MURAL - Maynooth University Research Archive Library



    Items where Author is "Gaman, C."


    Up a level
    Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
    Group by: Item Type | Date | No Grouping
    Jump to: Article
    Number of items: 1.

    Article

    Milosavljević, V. and Ellingboe, A.R. and Gaman, C. and Ringwood, John (2008) Real-time plasma control in a dual-frequency, confined plasma etcher. Journal of Applied Physics, 103 (083302). ISSN 0021-8979

    This list was generated on Fri Nov 22 23:19:00 2024 UTC.
    MURAL - Maynooth University Research Archive Library is powered by EPrints 3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.