Article

Iordanov, Petar and Ringwood, John and Doherty, Sean (2005) Nonlinear Control Design for a Plasma Process. 44th IEEE Conference on Decision and Control and the European Control Conference, 2005. pp. 2380-2385.

Iordanov, Petar and Ringwood, John and Doherty, Sean (2005) Control problem classification for a plasma process. Proceedings of the 16th IFAC World Congress, Prague.

Conference or Workshop Item

Iordanov, Petar and Ringwood, John (2010) Control-Oriented Modelling of an Experimental Ar-O2 Plasma Process. In: IEEE International Conference on Industrial Technology (ICIT), March, 2010, Valparaiso, Chile.

Bacelli, Giorgio and Ringwood, John and Iordanov, Petar (2007) Impedance matching controller for an inductively coupled plasma chamber: L-type Matching Network Automatic Controller. In: ICINCO 2007, 4th International Conference on Information in Control, Automation and Robotics, 9 - 12 May, 2007, Angers, France. (Unpublished)

Iordanov, Petar and Keville, Bernard and Ringwood, John and Doherty, Sean and Faulkner, Ronan (2006) On the closed-loop control of an argon plasma process. In: Irish Signals and Systems Conference (ISSC 2006), June 2006, Dublin.

Keville, Bernard and Iordanov, Petar and Ringwood, John and Doherty, Sean and Faulkner, Ronan and Soberon, Felipe and McCarter, Angus (2006) On the modelling and closed loop control of an inductively coupled plasma chamber. In: IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing, December 2006, Singapore.