MURAL - Maynooth University Research Archive Library



    Items where Author is "Keville, Bernard"


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    Conference or Workshop Item

    Iordanov, Petar, Keville, Bernard, Ringwood, John, Doherty, Sean and Faulkner, Ronan (2006) On the closed-loop control of an argon plasma process. In: Irish Signals and Systems Conference (ISSC 2006), June 2006, Dublin.

    Keville, Bernard, Iordanov, Petar, Ringwood, John, Doherty, Sean, Faulkner, Ronan, Soberon, Felipe and McCarter, Angus (2006) On the modelling and closed loop control of an inductively coupled plasma chamber. In: IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing, December 2006, Singapore.

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