MURAL - Maynooth University Research Archive Library



    Items where Author is "Lynn, S."


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    Number of items: 2.

    2012

    Lynn, S., Macgearailt, N. and Ringwood, John (2012) Real-time virtual metrology and control of etch rate in an industrial plasma chamber. Proceedings of the IEEE Conference on Control Applications (CAA), Dubrovnik.

    2009

    Ragnoli, E., McLoone, Sean F., Lynn, S., Ringwood, John and Macgearailt, N. (2009) Identifying key process characteristics and predicting etch rate from High-Dimension Datasets. Advanced Semiconductor Manufacturing Conference, 2009. . viii-ix. ISSN 1078-8743

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