MURAL - Maynooth University Research Archive Library



    Items where Author is "Lynn, S."


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    Jump to: 2012 | 2009
    Number of items: 2.

    2012

    Lynn, S. and Macgearailt, N. and Ringwood, John (2012) Real-time virtual metrology and control of etch rate in an industrial plasma chamber. Proceedings of the IEEE Conference on Control Applications (CAA), Dubrovnik.

    2009

    Ragnoli, E. and McLoone, Sean F. and Lynn, S. and Ringwood, John and Macgearailt, N. (2009) Identifying key process characteristics and predicting etch rate from High-Dimension Datasets. Advanced Semiconductor Manufacturing Conference, 2009. . viii-ix. ISSN 1078-8743

    This list was generated on Sat Sep 25 22:28:25 2021 UTC.