MURAL - Maynooth University Research Archive Library



    Items where Author is "Ma, Beibei"


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    Number of items: 4.

    2010

    Ma, Beibei and McLoone, Sean F. and Ringwood, John and MacGearailt, Niall (2010) An Analysis of Noise on Optical Emission Spectroscopy Measurements. In: Irish Signals and Systems Conference 2010, June, 2010, Cork.

    2009

    Ma, Beibei (2009) Unsupervised Feature Extraction Techniques for Plasma Semiconductor Etch Processes. PhD thesis, National University of Ireland Maynooth.

    2008

    Ma, Beibei and McLoone, Sean F. and Ringwood, John and Macgerailt, N. (2008) Selecting signature optical emission spectroscopy variables using sparse principal component analysis. In: 11th International Conference on Computer and Information Technology, 2008. ICCIT 2008. 10.1109/ICCITECHN.2008.4803104 . IEEE, pp. 14-19. ISBN 9781424421350

    2007

    Ma, Beibei and McLoone, Sean F. and Ringwood, John (2007) Tracking plasma etch process variations using Principal Component Analysis of OES data. In: ICINCO 2007, 4th International Conference on Information in Control, Automation and Robotics, 9 - 12 May, 2007, Angers, France. (Unpublished)

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