MURAL - Maynooth University Research Archive Library

    Items where Author is "Macgearailt, N."

    Up a level
    Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
    Group by: Item Type | Date | No Grouping
    Jump to: Article
    Number of items: 2.


    Lynn, S. and Macgearailt, N. and Ringwood, John (2012) Real-time virtual metrology and control of etch rate in an industrial plasma chamber. Proceedings of the IEEE Conference on Control Applications (CAA), Dubrovnik.

    Ragnoli, E. and McLoone, Sean F. and Lynn, S. and Ringwood, John and Macgearailt, N. (2009) Identifying key process characteristics and predicting etch rate from High-Dimension Datasets. Advanced Semiconductor Manufacturing Conference, 2009. . viii-ix. ISSN 1078-8743

    This list was generated on Wed Feb 28 22:53:25 2024 UTC.