MURAL - Maynooth University Research Archive Library



    Items where Author is "McCarter, Angus"


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    Conference or Workshop Item

    Keville, Bernard, Iordanov, Petar, Ringwood, John, Doherty, Sean, Faulkner, Ronan, Soberon, Felipe and McCarter, Angus (2006) On the modelling and closed loop control of an inductively coupled plasma chamber. In: IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing, December 2006, Singapore.

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