MURAL - Maynooth University Research Archive Library

    Items where Author is "Soberon, Felipe"

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    Keville, Bernard and Iordanov, Petar and Ringwood, John and Doherty, Sean and Faulkner, Ronan and Soberon, Felipe and McCarter, Angus (2006) On the modelling and closed loop control of an inductively coupled plasma chamber. In: IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing, December 2006, Singapore.

    This list was generated on Thu Jul 11 23:00:48 2024 UTC.