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    Items where Author is "Ma, Beibei Ma"


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    2010

    Ringwood, John, Lynn, Shane, Bacelli, Giorgio, Ma, Beibei Ma, Ragnoli, Emanuele and McLoone, Sean F. (2010) Estimation and Control in Semiconductor Etch: Practice and Possibilities. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 23 (1). ISSN 0894-6507

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