MURAL - Maynooth University Research Archive Library



    Items where Author is "Ragnoli, Emanuele"


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    Number of items: 4.

    2010

    Ringwood, John and Lynn, Shane and Bacelli, Giorgio and Ma, Beibei Ma and Ragnoli, Emanuele and McLoone, Sean F. (2010) Estimation and Control in Semiconductor Etch: Practice and Possibilities. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 23 (1). ISSN 0894-6507

    2009

    Lynn, Shane and Ringwood, John and Ragnoli, Emanuele and McLoone, Sean F. and MacGearailt, Niall (2009) Virtual Metrology for Plasma Etch using Tool Variables. Advanced Semiconductor Manufacturing Conference, 2009. . pp. 143-148. ISSN 1078-8743

    2008

    Ragnoli, Emanuele and McLoone, Seamus and Ringwood, John and Macgerailt, N. (2008) Matrix Factorisation Techniques for Endpoint Detection in Plasma Etching. In: IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE, pp. 156-161. ISBN 9781424419647

    2006

    Ragnoli, Emanuele (2006) A consistent Mathematical Framework for linear feedback systems using distributions. PhD thesis, National University of Ireland Maynooth.

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