MURAL - Maynooth University Research Archive Library



    Items where Author is "MacGearailt, Niall"


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    Number of items: 8.

    Article

    Lynn, Shane and Ringwood, John and MacGearailt, Niall (2012) Global and Local Virtual Metrology Models for a Plasma Etch Process. IEEE Transactions on Semiconductor Manufacturing, 25 (1). pp. 94-103. ISSN 0894-6507

    Lynn, Shane and MacGearailt, Niall and Ringwood, John (2012) Real-time virtual metrology and control for plasma etch. Journal of Process Control, 22. pp. 666-676. ISSN 0959-1524

    Lynn, Shane and MacGearailt, Niall and Ringwood, John (2011) Real-time Virtual Metrology and Control of Plasma Electron Density in an Industrial Plasma Etch Chamber. Proceedings of 18th IFAC World Congress. pp. 12060-12065. ISSN 1474-6670

    Lynn, Shane and Ringwood, John and Ragnoli, Emanuele and McLoone, Sean F. and MacGearailt, Niall (2009) Virtual Metrology for Plasma Etch using Tool Variables. Advanced Semiconductor Manufacturing Conference, 2009. . pp. 143-148. ISSN 1078-8743

    Conference or Workshop Item

    Lynn, Shane and Ringwood, John and MacGearailt, Niall (2012) Gaussian Process Regression for Virtual Metrology of Plasma Etch. In: Irish Signals and Systems Conference 2010, June, 2010, Cork.

    Ma, Beibei and McLoone, Sean F. and Ringwood, John and MacGearailt, Niall (2010) An Analysis of Noise on Optical Emission Spectroscopy Measurements. In: Irish Signals and Systems Conference 2010, June, 2010, Cork.

    Lynn, Shane and Ringwood, John and MacGearailt, Niall (2010) Weighted windowed PLS models for virtual metrology of an industrial plasma etch process. In: IEEE International Conference on Industrial Technology (ICIT), March, 2010, Chile.

    Butler, Shane and Ringwood, John and MacGearailt, Niall (2009) Prediction of Vacuum Pump Degradation in Semiconductor Processing. In: SAFEPROCESS'09, 7th IFAC Symposium on Fault Detection, Supervision and Safety of Technical Processes, June 30 - July 3 2009, Barcelona.

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